Dynamic Analysis of Vibration Attenuation in Dual-Stage Cascade Spring-Mass System (DCSMS) for High-Precision Instrumentation

The detrimental effects of low-frequency vibrations on the measurement accuracy of commercial high-precision instrumentation demand urgent resolution, particularly for instruments requiring <1 μm positioning stability. Conventional base-mounted active damping systems exhibit limitations in suppressing the structural resonance induced by passive isolators—especially when the environmental vibration intensity surpasses the standard thresholds. Therefore, in this study, we developed an innovative multi-mode control architecture to substantially enhance the vibration-damping capabilities of the DCSMS. The proposed methodology synergistically integrates foundation vibration isolators with embedded passive modules through a dual-stage spring-mass system optimization framework. Experimental validation combining ADAMS–MATLAB multi-physics co-simulation, complemented by a decoupling analytical control model based on the vibrational transmission characteristics of the source propagation path, substantiated the efficacy of the proposed control methodology.