An Eyeball‐Movement‐Inspired Multi‐DOF Miniature Piezoelectric Actuator with Strong Load‐Driving Capability

For miniature actuators, manipulating objects to achieve multi‐degree‐of‐freedom (multi‐DOF) motions is a critical skill for multitasking. However, equipping actuators with this capability in compact configurations is challenging while balancing operational efficiency. Inspired by the eye movements of humans, a miniature piezoelectric actuator with a square‐circular ring structure is reported. This combination‐customized design solution allows the driving feet to generate multidimensional oscillating trajectories, thus enabling 3‐DOF motions of different movers. A prototype measuring 31 × 31 × 4 mm 3 and weighing 7.18 g is fabricated. At 200 V p‐p , the spherical mover is driven to rotate at 26.51 rad s −1 , while the flat mover achieves linear and rotational speeds of 110.33 mm s −1 and 5.73 rad s −1 , respectively. Moreover, this actuator can manipulate these movers with rotational and linear resolutions at the sub‐milliradian and sub‐micron levels, respectively. The drivable load weighs up to 43.6 times that of the prototype, far exceeding the capabilities of comparable actuators with similar structural configurations. Notably, the actuator realizes multi‐DOF actuation without additional stators or transmission mechanisms, enabling its application in fault inspection of electronic components. This study provides a novel idea for developing multi‐DOF miniature actuators.