Influence of Deposition Temperature on Microstructure and Properties of Tantalum Oxide Sputtered Coatings

To increase the wear and corrosion resistance of (α + β) titanium-aluminium-vanadium (Ti6Al4V) alloy, ceramic tantalum oxide coatings were deposited by direct current (DC) magnetron sputtering at three different substrate temperatures-400, 450, and 500 °C. The crystallographic structure, surface morphology, chemical compositions, film adhesion, and hardness of the coatings were described using XRD, SEM, EDS, scratch tests, and microhardness measurements. The samples' ability to withstand corrosion was assessed using electrochemical studies. Results revealed that thin films have an amorphous or crystalline structure dependent on temperature. The film's thicknesses varied between 560 and 600 nm. With the increase in deposition temperature, the hardness of the film rose. All oxide coatings were tightly adherent to the titanium alloy substrate, and critical force increased from about 8.6 up to 20 N when the temperature rose from 400 to 500 °C. During the polarisation investigations, after 1 h of immersion, a drop in current density (j_corr) verified an improvement in the corrosion resistance of the amorphous and well-crystalline coatings. A two-layer model of the surface film accurately describes the coated systems' electrochemical behaviour. However, according to the EIS analysis, the well-crystalline film deteriorates greatly, whereas the amorphous film prevents penetration during the 7-day immersion test in SBF. The wettability tests demonstrated the hydrophilic nature of the coatings, and after seven days, the mineralisation of calcium phosphate proves the coatings become bioactive in simulated bodily fluid (SBF). Thus, we produced films of tantalum oxide, which, with the proper deposition parameters, may prove to be appropriate surfaces for titanium-based implant bio-applications.