High-brightness LDP source
The Laser-assisted Discharge-produced Plasma (LDP) EUV source is a system to generate EUV from discharged plasma triggered by laser on one electrode disc which is coated by tin film. The source has been proven as a highly reliable light source in EUVL high volume production. Also, LDP EUV source enables to generate high brightness with relatively larger EUV plasma, which benefits space stability as well as relatively larger plasma power. In this session, the following items will be presented. (1) LDP EUV source configuration and operation sequence. (2) LDP EUV source key performance. (3) Stability Improvement. (4) Reliability improvement. (5) Sample exposure application.
Authors
- Shunichi Morimoto
- Takahiro Shirai (ORCID: https://orcid.org/0000-0002-5444-6134)
- K. Aoki (ORCID: https://orcid.org/0000-0003-2418-0029)
- Noritaka Ashizawa
- Hidenori Watanabe
- Akihisa Nagano (ORCID: https://orcid.org/0009-0002-8711-4336)
- Koji Suzuki (ORCID: https://orcid.org/0000-0002-3878-8361)
- Yusuke Teramoto
- Yoshihiko Sato
- Daisuke Yajima
- Masakata Mamizuka
Institutions
- Ushio (Japan) (JP)
Publication Details
- Published
- 2025-04-22
- DOI
- https://doi.org/10.1117/12.3051333
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00