Influence of cantilever dimensions on time response characteristics of a MEMS piezoresistive-cantilever-based barometric pressure change sensor

Abstract A barometric pressure change sensor utilizing a microelectromechanical system piezoresistive cantilever achieves high sensitivity and robustness. However, its miniaturization is constrained by the trade-off between the cutoff frequency of the mechanical high-pass filter and the air chamber volume. This study investigates the relationship between cantilever dimensions and their frequency characteristics. Experimental and theoretical results confirm that the frequency response varies with cantilever length and thickness. These findings contribute to optimizing these parameters, enabling miniaturization while maintaining high sensitivity and a low cutoff frequency.