3D interconnects and III-V semiconductor plasma etching for low cost and high efficiency photonic devices
In this work, we fabricated multijunction solar cells with 3D interconnects to transfer the front side contact to the rear side. Anisotropic and low-damage III-V semiconductor plasma etching processes are characterized and discussed in order to realize the new contact architecture. 3D interconnected solar cells are successfully fabricated and they reduce shading losses from a standard 5-20% to just 3%. This new architecture achieves a 6-fold increase in wafer area use when compared to miniaturized solar cells with conventional connections, thanks to the via contacts and plasma dicing. 3D interconnects also enable photonic power devices with areas 3 orders of magnitude smaller than standard devices for Internet of Things applications. The new photovoltaic cell architecture will enhance the power yield per wafer while enabling low-cost miniaturized devices for applications such as photovoltaics and power over fiber.
Authors
- Abdelatif Jaouad (ORCID: https://orcid.org/0000-0002-1466-7346)
- Karin Hinzer (ORCID: https://orcid.org/0000-0002-2414-6288)
- Thomas Bidaud (ORCID: https://orcid.org/0000-0003-2166-6154)
- Christopher E. Valdivia (ORCID: https://orcid.org/0000-0002-6072-2959)
- Alison Clarke
- Guillaume Gay (ORCID: https://orcid.org/0000-0002-5444-5246)
- Camille Petit‐Etienne (ORCID: https://orcid.org/0000-0003-4199-5529)
- Mathieu de Lafontaine (ORCID: https://orcid.org/0000-0001-9158-0693)
- Artur Turala (ORCID: https://orcid.org/0000-0002-4633-6824)
- Maxime Darnon (ORCID: https://orcid.org/0000-0002-6188-7157)
- Simon Fafard (ORCID: https://orcid.org/0000-0003-3826-5023)
- Erwine Pargon
- V. Aimez
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université de Sherbrooke (CA)
- University of Ottawa (CA)
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2025-04-22
- DOI
- https://doi.org/10.1117/12.3055229
- Primary Topic
- Semiconductor Lasers and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00