GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate

We demonstrate thin-film surface acoustic wave (TF-SAW) phononic crystals (PnCs) by etching a square lattice array of micropores into a 300 nm LiNbO3-on-SiC substrate, harnessing the remarkable properties of Love modes. Our design enables tailorable bandgaps from 2.026 to 2.347 GHz (approximately 15% bandwidth) along Γ-X, extending up to 3.167 GHz along Γ-M, with experimental measurements confirming Love mode attenuation up to 40 dB. By precisely engineering the micropore geometry and layer configuration, we effectively tune both the position and width of the bandgaps. These TF-SAW PnCs offer powerful acoustic wave manipulation capabilities and scalability, opening horizons for high-throughput communication, sensing, microfluidics, and emerging quantum acoustics technologies.

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Publication Details

Journal
Applied Physics Letters
Published
2025-04-21
DOI
https://doi.org/10.1063/5.0254867
Primary Topic
Acoustic Wave Resonator Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate

Hua-Yang Chen, Nan Yu, Yi‐Han He, Yan‐Feng Chen et al.
1 links
Applied Physics Letters
Acoustic Wave Resonator Technologies
article

GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate

Hua-Yang Chen, Nan Yu, Yi‐Han He, Yan‐Feng Chen, Zhen-Hui Qin, Zhiwen Wang
article en

Abstract

We demonstrate thin-film surface acoustic wave (TF-SAW) phononic crystals (PnCs) by etching a square lattice array of micropores into a 300 nm LiNbO3-on-SiC substrate, harnessing the remarkable properties of Love modes. Our design enables tailorable bandgaps from 2.026 to 2.347 GHz (approximately 15% bandwidth) along Γ-X, extending up to 3.167 GHz along Γ-M, with experimental measurements confirming Love mode attenuation up to 40 dB. By precisely engineering the micropore geometry and layer configuration, we effectively tune both the position and width of the bandgaps. These TF-SAW PnCs offer powerful acoustic wave manipulation capabilities and scalability, opening horizons for high-throughput communication, sensing, microfluidics, and emerging quantum acoustics technologies.

Applied Physics LettersVol. 126(16)
Division of Materials Science and Engineering (AU), Collaborative Innovation Center of Advanced Microstructures (CN), Nanjing University (CN)
National Natural Science Foundation of China, National Key Research and Development Program of China
Openalex Percentile: Top 92%
Acoustic Wave Resonator Technologies
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GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate — Hua-Yang Chen, Nan Yu, et al. · Applied Physics Letters (2025) | TGRS Research Map | TGRS