Development of a Glassblown Micro-Hemispherical Shell Resonator With a Co-Fabricated Electrical Actuation Mechanism

This letter presents a glassblown microhemispherical shell resonator (μHSR), consisting of a micro-hemispherical shell and a ring-shaped electrode. The blow-molding process is employed to enable the simultaneous fabrication of the electrode and the resonator shell, thereby eliminating assembly errors inherent in traditional discrete assembly methods. Additionally, an innovative S-shaped metal lead is introduced to prevent metal tearing. The experimental results indicate that the surface roughness of the resonator is measured at only 0.217 nm. The resonant frequencies of the drive mode and sense mode are 3.4876 MHz and 3.4891 MHz respectively. Additionally, the Q factor in a 1 Pa vacuum environment is approximately 200 times greater than that at atmospheric pressure. This study offers a novel approach for advancing research on μHSRs.