Analysis of <i>A</i> ₀- and <i>A</i> ₁-mode Lamb waves and SH₁-mode plate wave resonance properties on piezoelectric substrate with periodic voids

Abstract The resonance properties of A 0 - and A 1 -mode Lamb waves and SH 1 mode plate waves in a LiNbO 3 (LN) thin plate bonded to a support substrate with periodic voids were simulated using the finite element method. Resonance properties similar to those of the plate waves were obtained by partially bonding the LN thin plate, and the main displacement nodes of the plate waves appeared on the support substrate. For the A 1 -mode Lamb wave on 123°YX-LN/4H-SiC with LN thickness h = 0.15 λ (where λ is the wavelength) and void width w to pitch p ratio ( w / p ) = 0.7, a resonance property with a fractional bandwidth (FBW) of 9.3% was obtained at a phase velocity of 15880 m s −1 . For the A 0 -mode Lamb wave on 141°YX-LN/glass with h = 0.28 λ and w / p = 0.7, a resonance property with FBW of 4.0% was obtained at a phase velocity of 2690 m s −1 .