Anti-aliasing multi-bit sigma-delta modulated cobweb-like disk resonator gyroscope with extending input range
A novel cobweb-like disk resonator gyroscope (CDRG) is introduced in this paper, which integrates a multi-bit electro-mechanical sigma-delta modulation (ΣΔΜ) system to significantly expand the input angular rate signal range, improving performance metrics like signal-to-noise ratio (SNR) and noise reduction. This design seeks to overcome the limitations associated with single-bit ΣΔΜ gyroscope systems by incorporating a linear multi-bit force feedback mechanism that utilizes nonlinear actuators driven by pulse density modulation. The proposed gyroscope system effectively broadens the input range without necessitating higher actuation voltages. In the absence of electronic trimming, experimental findings indicate significant enhancements in performance metrics: the input range, angle random walk, and bias instability improved by 30%, 106.2%, and 487.9%, respectively, when compared to traditional ΣΔΜ CDRG system configurations.
Authors
- Dacheng Xu (ORCID: https://orcid.org/0000-0002-1614-9606)
- Shuwen Guo (ORCID: https://orcid.org/0000-0002-8754-1613)
- Zhenghao Lu (ORCID: https://orcid.org/0000-0002-3913-3842)
- Yuyu Tan (ORCID: https://orcid.org/0009-0000-4955-8097)
- Bo Fan (ORCID: https://orcid.org/0000-0001-9577-8592)
- Fang Chen
- Shihao Du
- Jingchuan Zhou
Institutions
- Suzhou University of Science and Technology (CN)
- Suzhou Vocational University (CN)
- Suzhou Research Institute (CN)
- Shanghai Institute of Microsystem and Information Technology (CN)
- University of South China (CN)
Publication Details
- Journal
- Microsystems & Nanoengineering
- Published
- 2025-04-21
- DOI
- https://doi.org/10.1038/s41378-025-00919-1
- Citations
- 2
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 2.49
Funders
- National Natural Science Foundation of China
- National Key Research and Development Program of China