Fabrication and testing of piezoresistive sensed cantilever probe

In order to simultaneously detect the deflection and torsion of the cantilever beam and improve the deflection sensitivity, piezoresistive sensed cantilever probe based on dual Wheatstone bridge structure was designed. And a batch of probes were fabricated for testing. The deflection sensitivity of the single bridge structure was 0.174 μV/nN, and the deflection sensitivity of the dual bridge structure was 0.308 μV/nN. The deflection sensitivity of the dual bridge structure was about 77.01% higher than the single bridge structure. At the same time, the detection of the cantilever torsion was also realized, and the torsion sensitivity was about 0.040 μV/nN. The test results showed that the piezoresistive sensed cantilever probe based on dual Wheatstone bridge structure can detect the deflection and torsion of cantilever beam and improve the deflection sensitivity, which has certain application value.