Optical fiber micro-structure hydrophone probe based on MEMS technology

A silicon-based micro-electro-mechanical systems sensor membrane was designed through theoretical analysis and simulation. The sensitivity, response characteristics, and hydrostatic pressure resistance of the proposed structure were predicted using thin-plate theory and thin-film theory. The structural parameters of the flat membrane were determined based on theoretical analysis and design evaluation. The optical properties of the probes under varying media conditions and hydrostatic pressure were experimentally investigated. Sensitivity testing of the probes was conducted using a direct demodulation method, demonstrating a sensitivity of -170<i>d</i><i>B</i>.