Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance
We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.
Authors
- Kaitong Yang
- Dong Chen (ORCID: https://orcid.org/0000-0002-8904-9307)
- Jie Wang (ORCID: https://orcid.org/0000-0001-7870-0646)
- Zhun Gu
- Zhiqiang Zhu (ORCID: https://orcid.org/0000-0002-0044-3149)
- Hayford Boamah
Institutions
- Jiangsu University (CN)
- Suzhou Chien-Shiung Institute of Technology (CN)
Publication Details
- Journal
- RSC Advances
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1039/d4ra05762g
- Primary Topic
- Analytical Chemistry and Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Government of Jiangsu Province
- Natural Science Foundation of Jiangsu Province
- Qinglan Project of Jiangsu Province of China