Impact of Miniaturization on the Self-Heating Effect in MOSFET Devices

Abstract: With further scaling of MOSFETs to nanometer sizes, thermal effects have been a major issue affecting device performance and reliability. In this paper, we examine the temperature impacts in scaled MOSFETs, with a focus on selfheating mechanisms, thermal resistance modeling, and their effects on circuit performance. Based on an extensive literature survey and electro-thermal simulations, we examine the interplay among scaling, heat dissipation, and degradation of critical electrical parameters. We offer mathematical models for predicting thermal behavior in nanometer-scale devices and propose possible design considerations for avoiding self-heating