A 2-D Tin Disulfide Nanosheet Gas Sensor for Hydrogen Sulfide

This study uses tin disulfide (SnS<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>) powder with a MEMS structure to fabricate a micro-sheet (micro-Ss)/MEMS gas sensor. The SnS<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> powder assumes a two-dimensional (2D) nanosheet (nano-Ss) structure after ultrasonic wave grinding to produce a 2D SnS<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>-nano-Ss/MEMS gas sensor. The experimental results show that the SnS<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>-nano-Ss/MEMS gas sensor has a larger sensor response and lower resistance than micro-Ss/MEMS gas sensors so it is more easily integrated into circuit modules. If the SnS<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>-nano-Ss/MEMS H<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>S gas sensor operates at 180 ℃, it continues to detect H<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>S gas so the sensor is stable and reproducible. It is not sensitive to SO<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>, NO, H<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>, CO, CO<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>, or CH<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> gases, so the SnS<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>-nano-Ss/MEMS gas sensor features good selectivity for H<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>S gas.