Novel Microwave Plasma Source for Plasma Chemistry in Gases

Abstract In order to reduce the use and combustion of fossil raw materials, increasing reliance must be placed on renewable energies. Many strategies are currently being researched to enable the use of electrical energy from renewable resources for chemical synthesis [1, 2]. This contribution shows the possibility of obtaining basic chemicals by conversion using microwave plasma technology. A challenge for renewable energies, in addition to the storage problem, is the dependence on weather conditions. The plasma technology approach provides excellent flexibility in controlling of the process and thus in utilizing the fluctuating availability of cost‐effective renewable energies. This enables efficient and on‐demand operation.