RADIATION ENHANCED CRYSTALLIZATION OF AMORPHOUS LASER CONDENSATES OF HAFNIA AND ZIRCONIA

Amorphous films of hafnia (HfO2) and zirconia (ZrO2) were studied for crystallization under the action of an electron irradiation. Electron microscopy studies with “in situ” video recording of structural changes demonstrated, that phase transformation in hafnia is the dendrite polymorphous crystallization mode with the relative length δ0≈2380 and in zirconia is the island polymorphous crystallization mode with the relative length δ0≈ 915. The dependence on time of the fraction of the crystalline phase has a quadratic character for hafnia and an exponential one, described by the JMAK formula, for zirconia.