Charge Pump Phase-Locked Loop-Based Frequency Conditioning of a MEMS Resonator

MEMS resonators have attracted attention for their wide applications in highly accurate clock references, sensors, wireless communications, frequency control, etc. Most of the output frequencies of MEMS resonators require post-processing or calibration to be accurate enough. In this paper, a charge pump phase-locked loop-based frequency conditioning method for MEMS resonators is explored. An optimization scheme is proposed to enhance the frequency stability and signal quality of MEMS resonators. The experimental results show that the method significantly improves the resonator performance and achieves effective control of the resonant frequency. This research provides a new technical path for the design of high-performance MEMS oscillators, which has important theoretical significance and practical application value.