Modification of the structure and composition of tantalum oxynitride coatings depending on the deposition conditions
Abstract The combination of mechanical strength, biocompatibility, and functional versatility makes oxynitride coatings a promising material for various biomedical applications. Significant changes were detected in tantalum oxynitride’s structure and composition as a function of the conditions of deposition and the reactive gasses ratio in a mixture N 2 /O 2 at a constant total flowrate. Analysing the TaON coatings’ IR and Raman spectra along with the results of XRD and EDX studies provides useful information about the coatings’ compositional and structural characteristics in view of possible multifunctional applications.
Authors
- Mirosław Sawczak (ORCID: https://orcid.org/0000-0002-1365-5351)
- S Dudin
- N Donkov
- S Yakovin (ORCID: https://orcid.org/0000-0001-8588-8835)
- M. Klein (ORCID: https://orcid.org/0000-0002-9999-2534)
- V Safonov (ORCID: https://orcid.org/0000-0002-2351-3330)
- A Zykova (ORCID: https://orcid.org/0000-0001-6390-8161)
- Georgi Kolev
Institutions
- Bulgarian Academy of Sciences (BG)
- Kharkiv Institute of Physics and Technology (UA)
- Institute of Electronics (BG)
- Institute of Fluid Flow-Machinery (PL)
- University of Chemical Technology and Metallurgy (BG)
- V. N. Karazin Kharkiv National University (UA)
Publication Details
- Journal
- Journal of Physics Conference Series
- Published
- 2025-04-01
- DOI
- https://doi.org/10.1088/1742-6596/2994/1/012019
- Primary Topic
- Metal and Thin Film Mechanics
- Type
- article
- Field-Weighted Citation Impact
- 0.00