Advancements in MEMS gyroscopes: Piezoelectric plate-based devices for enhanced precision and stability in microelectromechanical systems

Micro-Electromechanical Systems (MEMS) gyroscopes have gained significant attention due to their compact size, low cost, and versatility in various applications, ranging from consumer electronics to aerospace and automotive systems. Among the different MEMS gyroscope designs, piezoelectric plate-based gyroscopes have emerged as a promising solution for achieving high sensitivity and precision in angular rate measurements. This paper explores the latest advancements in MEMS gyroscope technology, with a particular focus on the design, working principles, and potential applications of piezoelectric plate-based gyroscopes. This study addresses current challenges in the field, including accuracy, stability, and thermal performance, while presenting a detailed analysis of the mechanical and electrical characteristics of piezoelectric gyroscopes. Through a series of experiments and mathematical formulations, solutions are proposed to enhance the performance of MEMS gyroscopes under varying operational conditions. Finally, a case study is presented, demonstrating the application of piezoelectric MEMS gyroscopes in real-world scenarios, such as automotive safety systems and drone navigation, highlighting their impact on precision measurement technology.

Authors

Publication Details

Journal
i-manager’s Journal on Electronics Engineering
Published
2025-01-01
DOI
https://doi.org/10.26634/jele.15.2.21464
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
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article

Advancements in MEMS gyroscopes: Piezoelectric plate-based devices for enhanced precision and stability in microelectromechanical systems

K. Nirmala, S. Lakshmi, Eswaran Ushaa, P. Mahasri et al.
i-manager’s Journal on Electronics Engineering
Advanced MEMS and NEMS Technologies
article

Advancements in MEMS gyroscopes: Piezoelectric plate-based devices for enhanced precision and stability in microelectromechanical systems

K. Nirmala, S. Lakshmi, Eswaran Ushaa, P. Mahasri, Sree Pratibha P. Deep, V. Abimanan
article en

Abstract

Micro-Electromechanical Systems (MEMS) gyroscopes have gained significant attention due to their compact size, low cost, and versatility in various applications, ranging from consumer electronics to aerospace and automotive systems. Among the different MEMS gyroscope designs, piezoelectric plate-based gyroscopes have emerged as a promising solution for achieving high sensitivity and precision in angular rate measurements. This paper explores the latest advancements in MEMS gyroscope technology, with a particular focus on the design, working principles, and potential applications of piezoelectric plate-based gyroscopes. This study addresses current challenges in the field, including accuracy, stability, and thermal performance, while presenting a detailed analysis of the mechanical and electrical characteristics of piezoelectric gyroscopes. Through a series of experiments and mathematical formulations, solutions are proposed to enhance the performance of MEMS gyroscopes under varying operational conditions. Finally, a case study is presented, demonstrating the application of piezoelectric MEMS gyroscopes in real-world scenarios, such as automotive safety systems and drone navigation, highlighting their impact on precision measurement technology.

i-manager’s Journal on Electronics EngineeringVol. 15(2)
Openalex Percentile: Top 94%
Advanced MEMS and NEMS Technologies
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