Locally sealed microfabricated vapor cells filled from an ex situ Cs source

Microfabricated alkali vapor cells are key to enable miniature devices such as atomic clocks and optically pumped magnetometers with reduced size, weight, and power. Yet, more versatile fabrication methods are still needed to further expand their use cases. Here, we demonstrate an approach to collectively fill and seal microfabricated cesium cells using locally sealed microchannels patterned within one of the glass substrates comprising the cells. Unlike current methods that rely on wafer-level anodic bonding as the last sealing step, an approach based on local sealing opens the path to features so far limited to traditional glass-blown cells, including the ability to deposit temperature-sensitive antirelaxation coatings, reaching lower background gas pressure without an additional gettering material or filling with diverse atomic or molecular species.

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Publication Details

Journal
Applied Physics Letters
Published
2025-04-01
DOI
https://doi.org/10.1063/5.0265624
Citations
2
Primary Topic
Atomic and Subatomic Physics Research
Type
article
Field-Weighted Citation Impact
2.49

Funders

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article

Locally sealed microfabricated vapor cells filled from an ex situ Cs source

Abdelkrim Talbi, Philippe Pernod, Nicolas Passilly, A. Mazzamurro et al.
2 citations
Applied Physics Letters
Atomic and Subatomic Physics Research
2.49
article

Locally sealed microfabricated vapor cells filled from an ex situ Cs source

Abdelkrim Talbi, Philippe Pernod, Nicolas Passilly, A. Mazzamurro, A. Dewilde, Andrei Mursa, Vincent Maurice, Ravinder Chutani, Jérémy Bonhomme, Jean‐François Clément, Linda Péroux
article en
2 citations

Abstract

Microfabricated alkali vapor cells are key to enable miniature devices such as atomic clocks and optically pumped magnetometers with reduced size, weight, and power. Yet, more versatile fabrication methods are still needed to further expand their use cases. Here, we demonstrate an approach to collectively fill and seal microfabricated cesium cells using locally sealed microchannels patterned within one of the glass substrates comprising the cells. Unlike current methods that rely on wafer-level anodic bonding as the last sealing step, an approach based on local sealing opens the path to features so far limited to traditional glass-blown cells, including the ability to deposit temperature-sensitive antirelaxation coatings, reaching lower background gas pressure without an additional gettering material or filling with diverse atomic or molecular species.

Applied Physics LettersVol. 126(14)
Centre National de la Recherche Scientifique (FR), Université de Lille (FR), Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies (FR), Institut d'Electronique, de Microélectronique et de Nanotechnologie (FR), Université Marie et Louis Pasteur (FR), Université Polytechnique Hauts-de-France (FR), École Centrale de Lille (FR)
Agence Nationale de la Recherche
Openalex Percentile: Top 12%
Atomic and Subatomic Physics Research
2.49
DOIOpen Access PDFOpenAlex
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