Review and perspectives of the force-displacement measurement system with electromagnetic and electrostatic force compensation principles

Abstract The article reviews existing traceable small force-displacement measurement methods and presents a modified version of the force-displacement measurement device used to calibrate the stiffnesses of MEMS and cantilevers, as well as the forces they generate in the range from 10 nN to 2 mN. Separately, improved results for force constants and soft cantilever stiffness calibration (force up to 300 nN) with an expanded relative uncertainty of 0.46 % are shown. In conclusion, the prospects for the development of the force-displacement measurement system are discussed.