The influence of construction parameters and the type of substrate on the conductivity value of multilayer structures made of NiFe and SiO2

This article presents a method of obtaining multilayer NiFe-SiO2 nanocomposites by non-reactive magnetron sputtering. Structures with different numbers and thicknesses of layers were made on two different types of dielectric substrates. Electrical parameters were tested in the frequency range from 4 Hz to 8 MHz, as well as measurements of the surface roughness of the substrates. Based on the results, the influence of design parameters and the aging effect on the AC properties of the structures was determined.