拼接原子光刻光栅衍射性能研究

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Publication Details

Journal
Infrared and Laser Engineering
Published
2025-01-01
DOI
https://doi.org/10.3788/irla20240502
Primary Topic
Advanced Measurement and Metrology Techniques
Type
article
Field-Weighted Citation Impact
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article

拼接原子光刻光栅衍射性能研究

邓晓 DENG Xiao, 吴益泽 WU Yize, 薛栋柏 XUE Dongbai, 肖光旭 XIAO Guangxu et al.
Infrared and Laser Engineering
Advanced Measurement and Metrology Techniques
article

拼接原子光刻光栅衍射性能研究

邓晓 DENG Xiao, 吴益泽 WU Yize, 薛栋柏 XUE Dongbai, 肖光旭 XIAO Guangxu, 沈俊宇 SHEN Junyu, 孔明 KONG Ming
article en

Abstract

No abstract available for this paper.
Infrared and Laser EngineeringVol. 54(3)
Openalex Percentile: Top 94%
Advanced Measurement and Metrology Techniques
DOISourceOpenAlex
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拼接原子光刻光栅衍射性能研究 — 邓晓 DENG Xiao, 吴益泽 WU Yize, et al. · Infrared and Laser Engineering (2025) | TGRS Research Map | TGRS