On-chip polymer-based temperature sensor with Mach-Zehnder geometry

This work presents the development of a temperature sensor fabricated using a 3D laser lithography system, based on a Mach-Zehnder Interferometer (MZI) configuration. The sensor leverages the precise microfabrication capabilities of two-Photon Polymerization (2PP) to create highly sensitive and scalable devices with customizable geometries. The Mach-Zehnder interferometer structure, known for its sensitivity to changes in environmental parameters, was designed to detect temperature variations by exploiting the phase shift induced in the interferometer arms due to thermal expansion or refractive index changes. The sensor's performance was characterized by evaluating the temperature-dependent shifts in interference patterns, demonstrating high accuracy and responsivity. The use of the commercial Nanoscribe system enables the creation of intricate, compact, and robust sensor designs, offering potential applications in various fields, including environmental monitoring, industrial processes, and biomedical diagnostics.