Nanoscale Calibration Standards for On-Wafer S-Parameters measurements up to 110 GHz
We report the first experimental results on the design and fabrication of nanoscale on-wafer calibration standards operating up to 110 GHz. The propagation constant and effective permittivity of coplanar waveguide (CPW) transmission lines (TLs) are extracted from raw S-parameters using the Thru-Reflect-Line (TRL) method. Experimental data show deviations in extracted propagation characteristics when comparing nanostructures to microscale structures.
Authors
- Clément Lenoir (ORCID: https://orcid.org/0000-0001-9271-3486)
- Mohamed Sebbache (ORCID: https://orcid.org/0000-0002-0004-261X)
- Kamel Haddadi (ORCID: https://orcid.org/0000-0002-4857-5220)
- Florent Marlec (ORCID: https://orcid.org/0000-0003-1431-7802)
- Djamel Allal (ORCID: https://orcid.org/0000-0001-6907-2414)
- Daouda Seck
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université de Lille (FR)
- Laboratoire National de Métrologie et d'Essais (FR)
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (FR)
- Université Polytechnique Hauts-de-France (FR)
- École Centrale de Lille (FR)
Publication Details
- Journal
- EPJ Web of Conferences
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1051/epjconf/202532312003
- Primary Topic
- Microwave and Dielectric Measurement Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Association Nationale de la Recherche et de la Technologie