Design and Experiment of Electromagnetic Micro-mirror Based on Polyimide

This paper proposes a micro-mirror structure based on PI material and electromagnetic-driven for low-cost, high-reliability, and portable devices. Through design, the rotation angle of the micro-mirror is effectively improved. A finite element simulation model of the device was established, and statics, modal and harmonic response analysis, and driven signal and scanning output analysis of the device were carried out. The experimental results show that the micro-mirror can work under the set resonant mode, with a working frequency of about 56.4Hz and a Q value of about 3.525. The scanning angle meets the design requirements. This scanner provides a new solution for the design of space-encoded optical multiplexing speckle cameras.