Particle Evolution of Flexible Pulsed Coplanar Dielectric Barrier Discharge Plasma Sheets and Its Effect on Sterilization

ABSTRACT Plasma sources using soft substrates are gaining attention in biomedicine for their flexibility. Balancing surface discharge stability on thin films with biomedical effects is crucial. Despite progress in flexible plasma sources design, optimization of plasma generation and particle evolution remains unclear. This study uses nanosecond‐edge pulses to excite a plasma sheet with an interdigitated electrode, exploring discharge properties and particle evolution. Sterilization of Staphylococcus aureus , Pseudomonas aeruginosa and Escherichia coli is assessed under varying conditions. Results show discharge intensity, particle generation, and sterilization effect increase with pulse amplitude and frequency. Optimal settings for stability, safety, and efficacy are 3–4 kV, 0.5–1 kHz, and 100 ns pulse rising edge. The bactericidal mechanism is mainly due to active particles, regulated by excitation parameters.