Analysis of Diamond-Like Carbon Coatings Obtained by Pulsed Magnetron Sputtering

The formation of amorphous diamond-like carbon coatings and the content of the sp3-hybrid carbon fraction in diamond-like carbon (DLC) films using the method of ion-plasma sputtering of a graphite target is analyzed. The results obtained are compared with those of coating of silicon samples with aluminum oxide by high-powered pulsed magnetron sputtering of constant power under different modes in a vacuum chamber. The structure of the resultant coatings is studied using scanning tunneling microscopy and spectroscopy. A strong dependence of the mechanical characteristics of carbon coatings on the main parameters that determine the deposition modes is established.