Energy consumption analysis in Siemens reactor with high-silicon core and novel inlet–outlet ports

With the growing demand for polysilicon, scaling up Siemens reactors (SR) has become a crucial approach to improving production efficiency and reducing unit production costs. However, the increased SR size has led to a significant rise in total energy consumption, necessitating efforts to address the challenge of reducing energy consumption while maintaining production output. This study focuses on a 40-pair silicon rod large-capacity SR with a high silicon core and novel inlet–outlet ports, investigating the effects of parameters such as the inlet gas velocity (v), silicon rod surface temperature (Ts), wall emissivity (ε), and silicon rod diameter (d) on energy consumption, as well as their interaction effects. The results indicate that an increase in v raises convective heat loss (CHL) by 29.40%. An elevated Ts increases radiative heat loss (RHL) by 46.18%. Reducing ε effectively decreases RHL by 33.94%. Although increasing the d leads to higher RHL and CHL, it significantly reduces the specific energy consumption per unit mass of polysilicon by 76.69%. The synergistic influence of Ts and d has the most substantial impact on energy consumption, increasing by 62.48%. In conclusion, optimizing v, Ts, ε, and d are effective strategies for achieving energy savings and reducing energy consumption in SR. This study provides a theoretical foundation for the high-efficiency, low-energy operation of the Siemens process and holds significant importance for promoting the green and sustainable development of the high-purity polysilicon industry.

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Publication Details

Journal
Physics of Fluids
Published
2025-04-01
DOI
https://doi.org/10.1063/5.0266588
Citations
1
Primary Topic
Advancements in Semiconductor Devices and Circuit Design
Type
article
Field-Weighted Citation Impact
0.73

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Energy consumption analysis in Siemens reactor with high-silicon core and novel inlet–outlet ports

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1 citations
Physics of Fluids
Advancements in Semiconductor Devices and Circuit Design
0.73
article

Energy consumption analysis in Siemens reactor with high-silicon core and novel inlet–outlet ports

Yan Qing Hou, Dan Zhao, Qian Xu, Xingping Yuan, Qingyun Jiang, Qinghui Lv, Gang Xie, Lijie Guo, Wenhui Ma, Ni Yang
article en
1 citations

Abstract

With the growing demand for polysilicon, scaling up Siemens reactors (SR) has become a crucial approach to improving production efficiency and reducing unit production costs. However, the increased SR size has led to a significant rise in total energy consumption, necessitating efforts to address the challenge of reducing energy consumption while maintaining production output. This study focuses on a 40-pair silicon rod large-capacity SR with a high silicon core and novel inlet–outlet ports, investigating the effects of parameters such as the inlet gas velocity (v), silicon rod surface temperature (Ts), wall emissivity (ε), and silicon rod diameter (d) on energy consumption, as well as their interaction effects. The results indicate that an increase in v raises convective heat loss (CHL) by 29.40%. An elevated Ts increases radiative heat loss (RHL) by 46.18%. Reducing ε effectively decreases RHL by 33.94%. Although increasing the d leads to higher RHL and CHL, it significantly reduces the specific energy consumption per unit mass of polysilicon by 76.69%. The synergistic influence of Ts and d has the most substantial impact on energy consumption, increasing by 62.48%. In conclusion, optimizing v, Ts, ε, and d are effective strategies for achieving energy savings and reducing energy consumption in SR. This study provides a theoretical foundation for the high-efficiency, low-energy operation of the Siemens process and holds significant importance for promoting the green and sustainable development of the high-purity polysilicon industry.

Physics of FluidsVol. 37(4)
Kunming University of Science and Technology (CN), Yunnan University (CN), Kunming Metallurgical Research Institute (CN), Baoshan University (CN)
National Natural Science Foundation of China, Major Science and Technology Projects in Yunnan Province
Openalex Percentile: Top 30%
Advancements in Semiconductor Devices and Circuit Design
0.73
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