Optimized Encapsulation Design for Reducing Low-Frequency Loss in MEMS Ciliary Hydrophones
To mitigate the low-frequency loss caused by oil-filled encapsulation in MEMS ciliary hydrophones, this study proposes a novel MEMS vector hydrophone cap design. The design incorporates a stainless-steel mesh cap structure combined with polystyrene thin-film deposition technology, effectively focusing sound. Simulation analyses were conducted to determine the optimal dimensions for the hydrophone cap. Experimental results show that the combination of the hydrophone cap and parylene film achieves an 18 dB sensitivity improvement in the low-frequency range (20-80 Hz) compared to oil-filled encapsulation, with an operational bandwidth of 20-630 Hz.
Authors
- Zimeng Guo (ORCID: https://orcid.org/0009-0009-8125-1904)
- Guojun Zhang (ORCID: https://orcid.org/0000-0001-6879-8862)
- Wendong Zhang (ORCID: https://orcid.org/0000-0003-1762-9246)
- Yuhao Huang (ORCID: https://orcid.org/0009-0004-2089-722X)
- Wenqing Zhang (ORCID: https://orcid.org/0009-0005-5606-5641)
- Jiangjiang Wang (ORCID: https://orcid.org/0009-0003-7873-4258)
- Ran Zhang (ORCID: https://orcid.org/0009-0001-6829-1030)
Institutions
- North University of China (CN)
Publication Details
- Journal
- IEEE Sensors Journal
- Published
- 2025-04-03
- DOI
- https://doi.org/10.1109/jsen.2025.3555804
- Citations
- 2
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 1.35
Funders
- National Natural Science Foundation of China