Resonant High-Pressure Microsensors With Stress Redistributions Based on Supporting Micro-Beams

This letter introduces a resonant high-pressure microsensor, which utilizes a single pair of supporting micro-beams to achieve stress redistribution along the resonators through volume-compressed sensing. The principle of stress redistributions by supporting micro-beams was discussed and through an orthogonal parameter analysis, the influence weights of geometric parameters are determined. Microfabrication was conducted to fabricate the microsensor and the pressure sensitivities were quantified as 0.125 kHz/MPa of Resonator I, −0.122 kHz/MPa of Resonator II, and 0.247 kHz/MPa of the differential output of the dual resonators under 20°C and the resolution is quantified as 0.00014%FS over a 70MPa full scale. This study introduces a novel supporting micro-beam design that achieves flexible stress redistribution through the simple and compact structure. This breakthrough enables unprecedented adaptability of pressure sensitivity across wide measurement ranges and thermal conditions while maintaining structural simplicity.