Research on the Influence of Assembly Error of Hemispherical Resonator Gyroscope on Frequency Splitting

The assembly of hemispherical resonators and flat electrodes is an important step in the manufacturing process of hemispherical resonator gyroscopes. Tilt errors can occur during precision assembly because the electrostatic force generated by the bias voltage varies at different centre angles, leading to an increase in frequency split. We have focused on investigating the mechanism of the effect of tilt errors generated during the assembly process on the frequency split of hemispherical resonators. This article first analyses the formation mechanism of frequency splitting and provides a definition formula for frequency splitting; Then, the lip edge of the hemispherical resonator and the flat electrode were equivalent to a flat capacitor, and a hemispherical resonator gyroscope assembly model was established; At the same time, the effect of uneven electrostatic forces on the stiffness of resonators was analysed. Finally, the relationship between the bias voltage applied to the resonator and the change in frequency split was verified experimentally.