Parametric Analysis of Substrate Heating in Low-Pressure Inductively Coupled Plasma
Jin-Hoo Seong, Hee-Jung Yeom, Min Young Yoon, Do-Yeon Hwang, Hye-Jin Ju, Wooram Kim, Hyo-Chang Lee, and Jung-Hyung Kim. Applied Science and Convergence Technology 2025;34:75-9. https://doi.org/10.5757/ASCT.2025.34.2.75
Authors
- Min Young Yoon
- W. Kim (ORCID: https://orcid.org/0000-0001-6058-3365)
- Jung‐Hyung Kim (ORCID: https://orcid.org/0000-0002-7197-6073)
- Do‐Yeon Hwang
- Hyo‐Chang Lee (ORCID: https://orcid.org/0000-0003-2754-1512)
- Jin-Hoo Seong
- Haonan Ju
- Hee-Jung Yeom (ORCID: https://orcid.org/0000-0002-8101-6041)
Institutions
- Korea Aerospace University (KR)
- Korea Research Institute of Standards and Science (KR)
Publication Details
- Journal
- Applied Science and Convergence Technology
- Published
- 2025-03-30
- DOI
- https://doi.org/10.5757/asct.2025.34.2.75
- Citations
- 1
- Primary Topic
- Plasma Diagnostics and Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- National Research Foundation
- Ministry of Trade, Industry and Energy
- Korea Research Institute of Standards and Science
- National Fusion Research Institute
- National Research Foundation of Korea
- National Research Council of Science and Technology
- Ministry of Science and ICT, South Korea
- Korea Semiconductor Research Consortium
- Korea Evaluation Institute of Industrial Technology