High Performance Novel High-<i>g</i> Piezoresistive Micro-Accelerometer With MHz Natural Frequency

High-g accelerometers are the core devices for high-impact signal measurement, and microelectromechanical systems (MEMSs) piezoresistive accelerometers, as the mainstream technological solution for high-g accelerometers, have serious mutual constraints on their sensitivity and natural frequency. In order to overcome the above problems, this article proposed a MEMS accelerometer with a range of 100000 g based on the pure axial deformation of piezoresistive beam. While ensuring the natural frequency of the accelerometer, the natural frequency of the sensor is substantially increased. Moreover, the structure does not require complex theoretical calculations to realize the pure axial stress state, which greatly simplifies the design process. The test results show that the proposed accelerometer has a natural frequency greater than 1 MHz and a sensitivity of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$2.47~\mu $ </tex-math></inline-formula>V/g/5 V, which indicates that the proposed accelerometer has high performance and can meet the needs in the field of high-impact signal measurement.