4H-SiC-based soft X-ray single photon detector with linear photon energy response

In this work, a 4H-SiC-based soft X-ray single photon detector with photon energy resolution capability is demonstrated.The 4H-SiC p-i-n detector with an 80-m-thick epi-layer and low intrinsic doping exhibits a low leakage current of 1.8 pA at -180 V, guaranteeing superior dark current performance for single photon detection with low electronic noise.An amplification strategy employing an active switch in the charge-sensitive amplifier has also been developed, where feedbackresistance-related thermal noise has been well eliminated, contributing to lower electronic noise in the amplification stage.By tuning the shaping time in the analog-to-digital circuit for precise signal processing, an optimal photon energy resolution has been achieved with a duration time within 6.4 s, achieving an energy analysis standard deviation below 5.7%.Ultimately, superior linearity has been obtained between the output pulse amplitude and the characteristic photon energy by utilizing a series of different metal targets, opening a new opportunity for advanced soft X-ray detection technology based on wide bandgap semiconductors.