Integration of Simulation and Scheduling for the Optimization of a Large Scale Semiconductor FAB

This paper presents a methodology to optimize semiconductor FAB operations by integrating simulation and scheduling. Due to the complexity and dynamic nature of modern FABs, traditional simulations fail to capture realistic interactions between AMHS simulation and scheduling. To address this, we propose a coupled simulation approach that allows real-time schedule updates and system status synchronization, enhancing responsiveness to fluctuations. Experimental results, based on the SMT2020 model, demonstrate improved production efficiency when jointly utilizing the real-time scheduler (RTS) and real-time dispatcher (RTD), compared to their isolated use. Key performance indicators, including total output, on-time delivery rate, and equipment utilization, suggest optimal FAB efficiency at specific dispatching loss thresholds, highlighting the importance of tailored RTS and RTD strategies. This approach provides a foundation for FAB digital twin research, with potential applications in real-world semiconductor manufacturing.