A Digital 2-bit Logic Device Utilizing a MEMS Frequency Comb Generator

This letter presents a digital 2-bit logic device based on a microelectromechanical (MEMS) frequency comb generator, leveraging the high tunability of the mechanical frequency comb. The device utilizes a MEMS capacitive ring resonator to produce an electrostatically actuated frequency comb, which can execute 2-bit logic operations, i.e., AND, OR, XOR, NOT, NOR, NAND, and XNOR. Utilizing the accurate control of frequency combs, this system enables flexible and dynamic logic processing, where pump signals to the resonator act as inputs and the mechanical oscillations of the resonator provide corresponding logic outputs. The proposed MEMS logic device demonstrates good performance, with a response time of approximately ~0.3 s and an energy consumption per switching cycle of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim 10^{-{13}}$ </tex-math></inline-formula> J. This study demonstrates the potential of frequency comb generation for digital logic, proposing an innovative approach that complements traditional components like transistors and highlights opportunities for integrating MEMS-based frequency comb generators in future mechanical computing systems.