AlGaN/GaN-based multi-channel epitaxial structure with an ultra-low 2DEG density and superior carrier transport performance
Abstract In this work, the relationship between two-dimensional electron gas (2DEG) density and electron velocity in AlGaN/GaN-based single-channel and multi-channel structures has been studied through I-shape test structure and pulsed I – V measurements. With an optimized epitaxial design, a multi-channel structure with a 2DEG density of 0.65 × 10 13 cm −2 presents a maximum electron velocity of 1.57 × 10 7 cm s −1 at 100 kV cm −1 , which is 2.4 times higher than that of conventional single-channel structure. This multi-channel structure with an ultra-low 2DEG density is highly suitable for enhanced-mode FinFETs, offering significant potential for radio-frequency mobile terminal applications, such as 5G handsets.
Authors
- Yaozong Zhong (ORCID: https://orcid.org/0000-0002-7939-4270)
- Xiaoning Zhan (ORCID: https://orcid.org/0000-0002-8259-250X)
- Xin Chen (ORCID: https://orcid.org/0000-0002-4601-1499)
- Qingru Wang (ORCID: https://orcid.org/0009-0009-3754-7855)
- X.Y. Zhang (ORCID: https://orcid.org/0000-0001-6759-8308)
- Xinlu Yang (ORCID: https://orcid.org/0000-0002-0972-9469)
- Yu Zhou (ORCID: https://orcid.org/0000-0001-5819-5187)
- Gaofei Zhi
- Hui Yu Yang (ORCID: https://orcid.org/0000-0003-4035-8894)
- Quan Li (ORCID: https://orcid.org/0000-0001-8563-1802)
- Jianxun Liu (ORCID: https://orcid.org/0000-0001-8485-166X)
- Quan Dai
- Qian Sun (ORCID: https://orcid.org/0000-0002-1141-4888)
Publication Details
- Journal
- Applied Physics Express
- Published
- 2025-03-31
- DOI
- https://doi.org/10.35848/1882-0786/adc77d
- Citations
- 1
- Primary Topic
- GaN-based semiconductor devices and materials
- Type
- article
- Field-Weighted Citation Impact
- 1.26
Funders
- National Natural Science Foundation of China
- Youth Innovation Promotion Association of the Chinese Academy of Sciences
- Basic Research Program of Jiangsu Province
- National Key Research and Development Program of China
- Science and Technology Program of Suzhou
- Basic and Applied Basic Research Foundation of Guangdong Province