Low Saturation Voltage and High Stability in Dual-Mode Schottky Barrier TFTs Using Bilayer IGZO

Schottky barrier thin-film transistors (SBTFTs) are promising for low-power electronics due to advantages such as low saturation voltage and high stability. In this study, we developed a high-performance bilayer IGZO SBTFT by combining a 4.7 nm atomic layer deposition (ALD) IGZO layer with an 11.8 nm sputtering IGZO layer, using platinum (Pt) and molybdenum (Mo) electrodes. The device exhibits dual-mode operation. In Schottky barrier TFT (SB-TFT) mode (Pt as source), the bilayer structure reduces defect density, achieving a very low saturation voltage (~0.4 V), high field-effect mobility (up to 20 cm2/V·s), and enhanced stability under stress conditions, including positive/negative bias and negative illumination. In quasi-Ohmic TFT (QO-TFT) mode (Pt as drain), the device retains conventional saturation behavior in output characteristics while delivering similar mobility and robust stability. This work provides a novel bilayer SBTFT design with dual functionality, enabling a higher current drive, improved stability, and flexibility for energy-efficient applications.