A Novel Compliant Stage with Input-Output Decoupling Based on a Parallel Mechanism

Due to the low stiffness and loose structure of some previously studied large-stroke XY positioning stages, this paper presents the design of a novel XY micropositioning stage based on a leaf-shaped flexible parallel mechanism. By modularizing the parallel mechanism and combining individual modules, a compact XY flexible stage with mixed series and parallel kinematics is developed. The stage is driven by a voice coil motor to decouple the input and output directions. In the mechanism design, the mechanical characteristics of single parallel, double parallel, and hybrid series mechanisms are studied in detail. A symmetrical layout is adopted to combine these mechanisms according to their individual characteristics, resulting in the novel flexible stage. Theoretical calculations and finite element simulation (FEA) analysis are performed to evaluate the stage's overall characteristics, including its range of motion, stiffness, and natural frequency. The stage can be accurately positioned within a working space of 15.4 mm 15.4 mm and exhibits a high natural frequency.