Ultra‐Broad‐Range Pressure Sensing Enabled by Synchronous‐Compression Mechanism Based on Microvilli‐Microstructures Sensor

Abstract A sensor which is able to detect both the high‐ pressure and the subtle pressure is crucial for applications such as physiological health monitoring and human‐machine interactions. However, current sensors often struggle to meet these requirements, as they usually rely on a single compression mechanism. In this study, a microvilli‐microstructures sensor is reported which is capable of tracking ultra‐broad‐range pressures based on a synchronous‐compression mechanism. The synchronous‐compression mechanism includes: i) the increase of microvilli‐induced electron‐transfer, ii) the increase of microstructure contact area, and iii) the decrease of multi‐walled carbon nanotubes spacing. At the high‐pressure stages, the mechanisms contribute synchronously to changes in resistance. Hence, this sensor can measure a 5 kPa pressure change under the extremely high‐ pressure (750 kPa) conditions of meniscus simulation, where the commercial sensor fails. This sensor exhibits a high sensitivity of 58.88 kPa −1 , an ultra‐broad working range from 50 Pa up to 782.5 kPa, a rapid response time of 9 ms, and a long‐duration (under 250 kPa pressure, cycling for 10,000 times). This flexible pressure sensor also shows versatility and potential for various applications. The synchronous‐compression mechanism proposed here can inspire future designs of high‐performance flexible sensors.