Incipient fault diagnosis method for silicon single crystal growth assisted by deep learning
A novel intelligent diagnostic method combining SVM-RFE feature selection, CEEMDAN decomposition and reconstruction, entropy feature extraction, and DBN deep learning is proposed for detecting small faults in silicon single crystal growth.
Authors
- Xuejun Ren (ORCID: https://orcid.org/0000-0001-6132-1228)
- Yuyu Liu (ORCID: https://orcid.org/0000-0001-6542-2325)
- Ding Liu (ORCID: https://orcid.org/0000-0002-2070-9661)
- Shi Hai Wu (ORCID: https://orcid.org/0000-0001-5866-1504)
Institutions
- Xi'an University of Technology (CN)
Publication Details
- Journal
- CrystEngComm
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1039/d5ce00101c
- Primary Topic
- Industrial Vision Systems and Defect Detection
- Type
- article
- Field-Weighted Citation Impact
- 0.00