Influence of Geometrical Parameters of Hydraulic Drive Based on IPMC Actuator on the Performance of Valveless Membrane Micropump

The development of microfluidics leads to the need to design high-performance micropumps with minimal overall dimensions. In order to use a valveless membrane micropump in a portable microfluidic system, the influence of the geometric parameters of the hydraulic drive elements based on the IPMC actuator on its performance was studied. The micropump was manufactured with overall dimensions of 24x23x6 mm and with a maximum performance of 3.39 μL/s.