Study of ZnO nanopowder and sintering process on the properties of target materials

Abstract This study investigates the effects of various ZnO nanopowder preparation methods and sintering processes on the properties of ZnO target materials to develop high‐quality ZnO ceramic materials for use as sputtering targets. ZnO nanopowders were prepared using a co‐precipitation method, pressing into green compacts and sintering at different temperatures and holding times. The sintering behavior and properties of the sintered samples were analyzed using x‐ray diffraction, scanning electron microscopy, thermal expansion analysis, and four‐probe resistivity measurements. Results show that powders with finer particles and higher surface energy exhibit better sintering performance, leading to easier densification and improved target properties. Increasing the sintering temperature and holding time within a specific range enhances the densification of the target material. However, exceeding this range causes ZnO volatilization, which degrades performance. Finally, high‐density ZnO targets (relative density > 99%) with a resistivity of 0.03 Ω·cm were achieved under optimized conditions.