MEMS-Integrated Tunable Fabry–Pérot Microcavity for High-Quality Single-Photon Sources

We propose a micro-electromechanical system (MEMS)-integrated Fabry–Pérot (F–P) microcavity designed for a tunable single-photon source based on a single semiconductor quantum dot (QD). Through theoretical simulations, our design achieved a Purcell factor of 23, a photon extraction efficiency exceeding 88%, and an optical cavity mode tuning range of more than 30 nm. Experimentally, we fabricated initial device prototypes using a micro-transfer printing process and demonstrated a tuning range exceeding 15 nm. The device exhibits high mechanical stability, full reversibility, and minimal hysteresis, ensuring reliable operation over multiple tuning cycles. Our findings highlight the potential of MEMS-integrated F–P microcavities for scalable, tunable single-photon sources. Furthermore, reaching a strong coupling regime could enable efficient single-photon routing, opening new possibilities for integrated quantum photonic circuits.