System Modeling of a Multi-Contact Microelectromechanical Logic Element

The opportunity of analyzing microelectromechanical logic elements using system modeling on the example of a multi-contact silicon microresonator with electrostatic excitation is demonstrated. To implement a complete functional set of logic gates based on a single resonator, a design with four side electrodes, two on each side of the moving element of the resonator, have been considered. A procedure for determining model parameters is described. The results of the analysis of the dynamic characteristics and logical operations of a multi-contact microresonator using the developed model are presented.