Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging

Authors

吴倩楠 Wu Qiannan
Shuang Wang (ORCID: https://orcid.org/0000-0002-4823-3511)
Li Kewu
Chen Chang (ORCID: https://orcid.org/0009-0006-8790-8813)
HE Zebin
YANG Junsheng
YANG Binglin

Publication Details

Journal: Journal of Applied Optics
Published: 2025-01-01
DOI: https://doi.org/10.5768/jao202546.0203004
Primary Topic: Integrated Circuits and Semiconductor Failure Analysis
Type: article
Field-Weighted Citation Impact: 0.00

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article

Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging

吴倩楠 Wu Qiannan, Shuang Wang, Li Kewu, Chen Chang et al.

Jan 1, 2025

Journal of Applied Optics

Integrated Circuits and Semiconductor Failure Analysis

article

Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging

吴倩楠 Wu Qiannan, Shuang Wang, Li Kewu, Chen Chang, HE Zebin, YANG Junsheng, YANG Binglin

January 1, 2025article en

Abstract

No abstract available for this paper.

Journal of Applied OpticsVol. 46(2)

Openalex Percentile: Top 95%

Integrated Circuits and Semiconductor Failure Analysis

DOI Open Access PDF OpenAlex

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Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging — 吴倩楠 Wu Qiannan, Shuang Wang, et al. · Journal of Applied Optics (2025) | TGRS Research Map | TGRS