Spherical surface reconstruction method based on a postural error compensation algorithm

Testing results of a spherical optical surface always involve some residual postural errors caused by the deviation of the tested surface from the ideal confocal position. This paper designs a compensation algorithm to achieve high-precision spherical surface reconstruction, which can instantly detect and deduct the tilt and defocus error during the spherical surface testing process. Both simulation and experimental results show that the accuracy of the surface reconstruction of this method is significantly better than that of the traditional Zernike fitting method, and the composite postural error in the optical path adjustment process is suppressed very well.