Drive Stabilization of Multi-Degree-of-Freedom Maglev Planar Motor Based on Closed Loop System Identification

Magnetic levitation planar motor can move at high speed and with high accuracy, and prevent vibration and noise because of no friction. This technology leads to the application of a transport system that requires high-speed and high-precision movement. However, the design of appropriate control algorithms is essential to achieve stability and high-speed, high-precision control of the maglev planar motor. In this research, we stabilized a maglev planar motor on the basis of system identification. Initially, we designed a whole control system for the movement of the maglev planar motor. Furthermore, we conducted system identification and verified that the maglev planar motor works with the designed control system and evaluated its motion performance. Through experiments, it was confirmed that accurate motion control was possible. This research is expected to be a basis for improving control performance soon.